特征 Features:
1、High speed real-time focusing
High speed real-time and intelligent focusing system with high-speed defocusing amount sampling can quickly detect the defocusing distance and direction of the target surface, adjust the working distance quickly, and ensure that the measured surface can be imaged clearly in real time. In a conventional 10X objective lens with a defocus distance of 100um, the refocusing time is less than 100ms.

2、Submicron level tracking accuracy
The focusing accuracy of the intelligent focusing system reaches sub micron level, and the focusing accuracy is better than 1/3 of the depth of field of the objective lens.

3、Wide focusing range
Under conventional objective magnification, the intelligent focusing system has a sufficiently large focusing range, which can compensate for the height positioning deviation of the target object during loading and adapt to more complex focusing scenes.

4、Good adaptability to the scene
Suitable for multiple materials and compatible with more complex target surface textures. Meet rigorous testing requirements: adapt to different imaging band requirements.

Autofocus working process:
The semi elliptical calibration beam output from the autofocus sensor is coupled into the objective lens through a beam splitter and converges into a light pattern. By capturing the contour of the light shape to obtain an image, the defocus distance and defocus direction are calculated, and the industrial computer sends instructions to the motion platform to achieve high-speed movement, keeping it always on the focal plane.